5/19/2011	12:00:36 AM	Bypass valve closed
5/19/2011	12:00:37 AM	Main Vac valve closed
5/19/2011	12:02:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/19/2011	12:02:22 AM	Recipe started at 12:02 AM
5/19/2011	12:02:22 AM	H2 valve closed
5/19/2011	12:02:22 AM	BCl3 valve closed
5/19/2011	12:02:22 AM	PH3 valve closed
5/19/2011	12:02:22 AM	SiCl4 pre valve closed
5/19/2011	12:02:22 AM	SiCl4 post valve closed
5/19/2011	12:02:22 AM	Main Vac valve closed
5/19/2011	12:02:22 AM	Bypass valve closed
5/19/2011	12:02:22 AM	Bubbler valve closed
5/19/2011	12:02:22 AM	Helium valve opened
5/19/2011	12:02:22 AM	Helium MFC set to  500.000000
5/19/2011	12:02:22 AM	H2 MFC set to  0.000000
5/19/2011	12:02:22 AM	BCl3 MFC set to  0.000000
5/19/2011	12:02:22 AM	PHl3 MFC set to  0.000000
5/19/2011	12:02:22 AM	SiCl4 MFC set to  0.000000
5/19/2011	12:02:22 AM	Bypass solenoid MFC set to  0.000000
5/19/2011	12:02:22 AM	Tube furnace set to 0
5/19/2011	12:03:59 AM	Helium valve closed
5/19/2011	12:03:59 AM	H2 valve closed
5/19/2011	12:03:59 AM	BCl3 valve closed
5/19/2011	12:03:59 AM	PH3 valve closed
5/19/2011	12:03:59 AM	SiCl4 pre valve closed
5/19/2011	12:03:59 AM	SiCl4 post valve closed
5/19/2011	12:03:59 AM	Main Vac valve closed
5/19/2011	12:03:59 AM	Bypass valve closed
5/19/2011	12:03:59 AM	Bubbler valve closed
5/19/2011	12:03:59 AM	Helium MFC set to  0.000000
5/19/2011	12:03:59 AM	H2 MFC set to  0.000000
5/19/2011	12:03:59 AM	BCl3 MFC set to  0.000000
5/19/2011	12:03:59 AM	PHl3 MFC set to  0.000000
5/19/2011	12:03:59 AM	SiCl4 MFC set to  0.000000
5/19/2011	12:03:59 AM	Bypass solenoid MFC set to  0.000000
5/19/2011	12:04:00 AM	Tube furnace set to 0
5/19/2011	12:04:00 AM	Run finished at 12:04 AM
5/19/2011	12:04:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/19/2011	12:04:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/19/2011	12:04:34 AM	Recipe started at 12:04 AM
5/19/2011	12:04:34 AM	Helium valve closed
5/19/2011	12:04:34 AM	H2 valve closed
5/19/2011	12:04:34 AM	BCl3 valve closed
5/19/2011	12:04:34 AM	PH3 valve closed
5/19/2011	12:04:34 AM	SiCl4 pre valve closed
5/19/2011	12:04:34 AM	SiCl4 post valve closed
5/19/2011	12:04:34 AM	Main Vac valve closed
5/19/2011	12:04:34 AM	Bubbler valve closed
5/19/2011	12:04:34 AM	Bypass valve opened
5/19/2011	12:04:34 AM	Helium MFC set to  0.000000
5/19/2011	12:04:34 AM	H2 MFC set to  0.000000
5/19/2011	12:04:34 AM	BCl3 MFC set to  0.000000
5/19/2011	12:04:34 AM	PHl3 MFC set to  0.000000
5/19/2011	12:04:34 AM	SiCl4 MFC set to  0.000000
5/19/2011	12:04:34 AM	Bypass solenoid MFC set to  0.000000
5/19/2011	12:04:35 AM	Tube furnace set to 0
5/19/2011	12:05:07 AM	Helium valve closed
5/19/2011	12:05:07 AM	H2 valve closed
5/19/2011	12:05:07 AM	BCl3 valve closed
5/19/2011	12:05:07 AM	PH3 valve closed
5/19/2011	12:05:07 AM	SiCl4 pre valve closed
5/19/2011	12:05:07 AM	SiCl4 post valve closed
5/19/2011	12:05:07 AM	Bubbler valve closed
5/19/2011	12:05:07 AM	Main Vac valve opened
5/19/2011	12:05:07 AM	Bypass valve opened
5/19/2011	12:05:07 AM	Helium MFC set to  0.000000
5/19/2011	12:05:07 AM	H2 MFC set to  0.000000
5/19/2011	12:05:07 AM	BCl3 MFC set to  0.000000
5/19/2011	12:05:07 AM	PHl3 MFC set to  0.000000
5/19/2011	12:05:07 AM	SiCl4 MFC set to  0.000000
5/19/2011	12:05:07 AM	Bypass solenoid MFC set to  0.000000
5/19/2011	12:05:07 AM	Tube furnace set to 0
5/19/2011	12:05:07 AM	Run finished at 12:05 AM
5/19/2011	12:05:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/19/2011	12:11:05 AM	Bypass valve closed
5/19/2011	12:11:05 AM	Main Vac valve closed
5/19/2011	12:12:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/19/2011	12:12:18 AM	Recipe started at 12:12 AM
5/19/2011	12:12:18 AM	Helium valve closed
5/19/2011	12:12:18 AM	H2 valve closed
5/19/2011	12:12:18 AM	BCl3 valve closed
5/19/2011	12:12:18 AM	PH3 valve closed
5/19/2011	12:12:18 AM	SiCl4 pre valve closed
5/19/2011	12:12:18 AM	SiCl4 post valve closed
5/19/2011	12:12:18 AM	Main Vac valve closed
5/19/2011	12:12:18 AM	Bubbler valve closed
5/19/2011	12:12:18 AM	Bypass valve opened
5/19/2011	12:12:18 AM	Helium MFC set to  0.000000
5/19/2011	12:12:18 AM	H2 MFC set to  0.000000
5/19/2011	12:12:18 AM	BCl3 MFC set to  0.000000
5/19/2011	12:12:18 AM	PHl3 MFC set to  0.000000
5/19/2011	12:12:18 AM	SiCl4 MFC set to  0.000000
5/19/2011	12:12:18 AM	Bypass solenoid MFC set to  0.000000
5/19/2011	12:12:18 AM	Tube furnace set to 0
5/19/2011	12:12:19 AM	Helium valve closed
5/19/2011	12:12:19 AM	H2 valve closed
5/19/2011	12:12:19 AM	BCl3 valve closed
5/19/2011	12:12:19 AM	PH3 valve closed
5/19/2011	12:12:19 AM	SiCl4 pre valve closed
5/19/2011	12:12:19 AM	SiCl4 post valve closed
5/19/2011	12:12:19 AM	Bubbler valve closed
5/19/2011	12:12:19 AM	Main Vac valve opened
5/19/2011	12:12:19 AM	Bypass valve opened
5/19/2011	12:12:19 AM	Helium MFC set to  0.000000
5/19/2011	12:12:19 AM	H2 MFC set to  0.000000
5/19/2011	12:12:19 AM	BCl3 MFC set to  0.000000
5/19/2011	12:12:19 AM	PHl3 MFC set to  0.000000
5/19/2011	12:12:19 AM	SiCl4 MFC set to  0.000000
5/19/2011	12:12:19 AM	Bypass solenoid MFC set to  0.000000
5/19/2011	12:12:19 AM	Tube furnace set to 0
5/19/2011	12:12:19 AM	Run finished at 12:12 AM
5/19/2011	12:12:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/19/2011	12:12:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/19/2011	12:12:47 AM	Recipe started at 12:12 AM
5/19/2011	12:12:47 AM	Helium valve closed
5/19/2011	12:12:47 AM	H2 valve closed
5/19/2011	12:12:47 AM	BCl3 valve closed
5/19/2011	12:12:47 AM	PH3 valve closed
5/19/2011	12:12:47 AM	SiCl4 pre valve closed
5/19/2011	12:12:47 AM	SiCl4 post valve closed
5/19/2011	12:12:47 AM	Main Vac valve closed
5/19/2011	12:12:47 AM	Bubbler valve closed
5/19/2011	12:12:47 AM	Bypass valve opened
5/19/2011	12:12:47 AM	Helium MFC set to  0.000000
5/19/2011	12:12:47 AM	H2 MFC set to  0.000000
5/19/2011	12:12:47 AM	BCl3 MFC set to  0.000000
5/19/2011	12:12:47 AM	PHl3 MFC set to  0.000000
5/19/2011	12:12:47 AM	SiCl4 MFC set to  0.000000
5/19/2011	12:12:47 AM	Bypass solenoid MFC set to  0.000000
5/19/2011	12:12:47 AM	Tube furnace set to 0
5/19/2011	12:12:48 AM	Helium valve closed
5/19/2011	12:12:48 AM	H2 valve closed
5/19/2011	12:12:48 AM	BCl3 valve closed
5/19/2011	12:12:48 AM	PH3 valve closed
5/19/2011	12:12:48 AM	SiCl4 pre valve closed
5/19/2011	12:12:48 AM	SiCl4 post valve closed
5/19/2011	12:12:48 AM	Bubbler valve closed
5/19/2011	12:12:48 AM	Main Vac valve opened
5/19/2011	12:12:48 AM	Bypass valve opened
5/19/2011	12:12:48 AM	Helium MFC set to  0.000000
5/19/2011	12:12:48 AM	H2 MFC set to  0.000000
5/19/2011	12:12:48 AM	BCl3 MFC set to  0.000000
5/19/2011	12:12:48 AM	PHl3 MFC set to  0.000000
5/19/2011	12:12:48 AM	SiCl4 MFC set to  0.000000
5/19/2011	12:12:48 AM	Bypass solenoid MFC set to  0.000000
5/19/2011	12:12:48 AM	Tube furnace set to 0
5/19/2011	12:13:48 AM	H2 valve closed
5/19/2011	12:13:48 AM	BCl3 valve closed
5/19/2011	12:13:48 AM	PH3 valve closed
5/19/2011	12:13:48 AM	SiCl4 pre valve closed
5/19/2011	12:13:48 AM	SiCl4 post valve closed
5/19/2011	12:13:48 AM	Bubbler valve closed
5/19/2011	12:13:48 AM	Helium valve opened
5/19/2011	12:13:48 AM	Main Vac valve opened
5/19/2011	12:13:48 AM	Bypass valve opened
5/19/2011	12:13:48 AM	Helium MFC set to  100.000000
5/19/2011	12:13:48 AM	H2 MFC set to  0.000000
5/19/2011	12:13:48 AM	BCl3 MFC set to  0.000000
5/19/2011	12:13:48 AM	PHl3 MFC set to  0.000000
5/19/2011	12:13:48 AM	SiCl4 MFC set to  0.000000
5/19/2011	12:13:48 AM	Bypass solenoid MFC set to  0.000000
5/19/2011	12:13:48 AM	Tube furnace set to 0
5/19/2011	12:14:48 AM	Helium valve closed
5/19/2011	12:14:48 AM	H2 valve closed
5/19/2011	12:14:48 AM	BCl3 valve closed
5/19/2011	12:14:48 AM	PH3 valve closed
5/19/2011	12:14:48 AM	SiCl4 pre valve closed
5/19/2011	12:14:48 AM	SiCl4 post valve closed
5/19/2011	12:14:48 AM	Bubbler valve closed
5/19/2011	12:14:48 AM	Main Vac valve opened
5/19/2011	12:14:48 AM	Bypass valve opened
5/19/2011	12:14:48 AM	Helium MFC set to  0.000000
5/19/2011	12:14:48 AM	H2 MFC set to  0.000000
5/19/2011	12:14:48 AM	BCl3 MFC set to  0.000000
5/19/2011	12:14:48 AM	PHl3 MFC set to  0.000000
5/19/2011	12:14:48 AM	SiCl4 MFC set to  0.000000
5/19/2011	12:14:48 AM	Bypass solenoid MFC set to  0.000000
5/19/2011	12:14:48 AM	Tube furnace set to 0
5/19/2011	12:15:48 AM	H2 valve closed
5/19/2011	12:15:48 AM	BCl3 valve closed
5/19/2011	12:15:48 AM	PH3 valve closed
5/19/2011	12:15:48 AM	SiCl4 pre valve closed
5/19/2011	12:15:48 AM	SiCl4 post valve closed
5/19/2011	12:15:48 AM	Bubbler valve closed
5/19/2011	12:15:48 AM	Helium valve opened
5/19/2011	12:15:48 AM	Main Vac valve opened
5/19/2011	12:15:48 AM	Bypass valve opened
5/19/2011	12:15:48 AM	Helium MFC set to  100.000000
5/19/2011	12:15:48 AM	H2 MFC set to  0.000000
5/19/2011	12:15:48 AM	BCl3 MFC set to  0.000000
5/19/2011	12:15:48 AM	PHl3 MFC set to  0.000000
5/19/2011	12:15:48 AM	SiCl4 MFC set to  0.000000
5/19/2011	12:15:48 AM	Bypass solenoid MFC set to  0.000000
5/19/2011	12:15:49 AM	Tube furnace set to 0
5/19/2011	12:16:49 AM	Helium valve closed
5/19/2011	12:16:49 AM	H2 valve closed
5/19/2011	12:16:49 AM	BCl3 valve closed
5/19/2011	12:16:49 AM	PH3 valve closed
5/19/2011	12:16:49 AM	SiCl4 pre valve closed
5/19/2011	12:16:49 AM	SiCl4 post valve closed
5/19/2011	12:16:49 AM	Bubbler valve closed
5/19/2011	12:16:49 AM	Main Vac valve opened
5/19/2011	12:16:49 AM	Bypass valve opened
5/19/2011	12:16:49 AM	Helium MFC set to  0.000000
5/19/2011	12:16:49 AM	H2 MFC set to  0.000000
5/19/2011	12:16:49 AM	BCl3 MFC set to  0.000000
5/19/2011	12:16:49 AM	PHl3 MFC set to  0.000000
5/19/2011	12:16:49 AM	SiCl4 MFC set to  0.000000
5/19/2011	12:16:49 AM	Bypass solenoid MFC set to  0.000000
5/19/2011	12:16:49 AM	Tube furnace set to 0
5/19/2011	12:17:49 AM	H2 valve closed
5/19/2011	12:17:49 AM	BCl3 valve closed
5/19/2011	12:17:49 AM	PH3 valve closed
5/19/2011	12:17:49 AM	SiCl4 pre valve closed
5/19/2011	12:17:49 AM	SiCl4 post valve closed
5/19/2011	12:17:49 AM	Bubbler valve closed
5/19/2011	12:17:49 AM	Helium valve opened
5/19/2011	12:17:49 AM	Main Vac valve opened
5/19/2011	12:17:49 AM	Bypass valve opened
5/19/2011	12:17:49 AM	Helium MFC set to  100.000000
5/19/2011	12:17:49 AM	H2 MFC set to  0.000000
5/19/2011	12:17:49 AM	BCl3 MFC set to  0.000000
5/19/2011	12:17:49 AM	PHl3 MFC set to  0.000000
5/19/2011	12:17:49 AM	SiCl4 MFC set to  0.000000
5/19/2011	12:17:49 AM	Bypass solenoid MFC set to  0.000000
5/19/2011	12:17:49 AM	Tube furnace set to 0
5/19/2011	12:18:49 AM	Helium valve closed
5/19/2011	12:18:49 AM	H2 valve closed
5/19/2011	12:18:49 AM	BCl3 valve closed
5/19/2011	12:18:49 AM	PH3 valve closed
5/19/2011	12:18:49 AM	SiCl4 pre valve closed
5/19/2011	12:18:49 AM	SiCl4 post valve closed
5/19/2011	12:18:49 AM	Bubbler valve closed
5/19/2011	12:18:49 AM	Main Vac valve opened
5/19/2011	12:18:49 AM	Bypass valve opened
5/19/2011	12:18:49 AM	Helium MFC set to  0.000000
5/19/2011	12:18:49 AM	H2 MFC set to  0.000000
5/19/2011	12:18:49 AM	BCl3 MFC set to  0.000000
5/19/2011	12:18:49 AM	PHl3 MFC set to  0.000000
5/19/2011	12:18:49 AM	SiCl4 MFC set to  0.000000
5/19/2011	12:18:49 AM	Bypass solenoid MFC set to  0.000000
5/19/2011	12:18:49 AM	Tube furnace set to 0
5/19/2011	12:19:49 AM	H2 valve closed
5/19/2011	12:19:49 AM	BCl3 valve closed
5/19/2011	12:19:49 AM	PH3 valve closed
5/19/2011	12:19:49 AM	SiCl4 pre valve closed
5/19/2011	12:19:49 AM	SiCl4 post valve closed
5/19/2011	12:19:49 AM	Bubbler valve closed
5/19/2011	12:19:49 AM	Helium valve opened
5/19/2011	12:19:49 AM	Main Vac valve opened
5/19/2011	12:19:49 AM	Bypass valve opened
5/19/2011	12:19:49 AM	Helium MFC set to  100.000000
5/19/2011	12:19:49 AM	H2 MFC set to  0.000000
5/19/2011	12:19:49 AM	BCl3 MFC set to  0.000000
5/19/2011	12:19:49 AM	PHl3 MFC set to  0.000000
5/19/2011	12:19:49 AM	SiCl4 MFC set to  0.000000
5/19/2011	12:19:49 AM	Bypass solenoid MFC set to  0.000000
5/19/2011	12:19:49 AM	Tube furnace set to 0
5/19/2011	12:20:49 AM	Helium valve closed
5/19/2011	12:20:49 AM	H2 valve closed
5/19/2011	12:20:49 AM	BCl3 valve closed
5/19/2011	12:20:49 AM	PH3 valve closed
5/19/2011	12:20:49 AM	SiCl4 pre valve closed
5/19/2011	12:20:49 AM	SiCl4 post valve closed
5/19/2011	12:20:49 AM	Bubbler valve closed
5/19/2011	12:20:49 AM	Main Vac valve opened
5/19/2011	12:20:49 AM	Bypass valve opened
5/19/2011	12:20:49 AM	Helium MFC set to  0.000000
5/19/2011	12:20:49 AM	H2 MFC set to  0.000000
5/19/2011	12:20:49 AM	BCl3 MFC set to  0.000000
5/19/2011	12:20:49 AM	PHl3 MFC set to  0.000000
5/19/2011	12:20:49 AM	SiCl4 MFC set to  0.000000
5/19/2011	12:20:49 AM	Bypass solenoid MFC set to  0.000000
5/19/2011	12:20:50 AM	Tube furnace set to 0
5/19/2011	12:21:50 AM	H2 valve closed
5/19/2011	12:21:50 AM	BCl3 valve closed
5/19/2011	12:21:50 AM	PH3 valve closed
5/19/2011	12:21:50 AM	SiCl4 pre valve closed
5/19/2011	12:21:50 AM	SiCl4 post valve closed
5/19/2011	12:21:50 AM	Bubbler valve closed
5/19/2011	12:21:50 AM	Helium valve opened
5/19/2011	12:21:50 AM	Main Vac valve opened
5/19/2011	12:21:50 AM	Bypass valve opened
5/19/2011	12:21:50 AM	Helium MFC set to  100.000000
5/19/2011	12:21:50 AM	H2 MFC set to  0.000000
5/19/2011	12:21:50 AM	BCl3 MFC set to  0.000000
5/19/2011	12:21:50 AM	PHl3 MFC set to  0.000000
5/19/2011	12:21:50 AM	SiCl4 MFC set to  0.000000
5/19/2011	12:21:50 AM	Bypass solenoid MFC set to  0.000000
5/19/2011	12:21:50 AM	Tube furnace set to 0
5/19/2011	12:22:50 AM	Helium valve closed
5/19/2011	12:22:50 AM	H2 valve closed
5/19/2011	12:22:50 AM	BCl3 valve closed
5/19/2011	12:22:50 AM	PH3 valve closed
5/19/2011	12:22:50 AM	SiCl4 pre valve closed
5/19/2011	12:22:50 AM	SiCl4 post valve closed
5/19/2011	12:22:50 AM	Bubbler valve closed
5/19/2011	12:22:50 AM	Main Vac valve opened
5/19/2011	12:22:50 AM	Bypass valve opened
5/19/2011	12:22:50 AM	Helium MFC set to  0.000000
5/19/2011	12:22:50 AM	H2 MFC set to  0.000000
5/19/2011	12:22:50 AM	BCl3 MFC set to  0.000000
5/19/2011	12:22:50 AM	PHl3 MFC set to  0.000000
5/19/2011	12:22:50 AM	SiCl4 MFC set to  0.000000
5/19/2011	12:22:50 AM	Bypass solenoid MFC set to  0.000000
5/19/2011	12:22:50 AM	Tube furnace set to 0
5/19/2011	12:23:50 AM	H2 valve closed
5/19/2011	12:23:50 AM	BCl3 valve closed
5/19/2011	12:23:50 AM	PH3 valve closed
5/19/2011	12:23:50 AM	SiCl4 pre valve closed
5/19/2011	12:23:50 AM	SiCl4 post valve closed
5/19/2011	12:23:50 AM	Bubbler valve closed
5/19/2011	12:23:50 AM	Helium valve opened
5/19/2011	12:23:50 AM	Main Vac valve opened
5/19/2011	12:23:50 AM	Bypass valve opened
5/19/2011	12:23:50 AM	Helium MFC set to  100.000000
5/19/2011	12:23:50 AM	H2 MFC set to  0.000000
5/19/2011	12:23:50 AM	BCl3 MFC set to  0.000000
5/19/2011	12:23:50 AM	PHl3 MFC set to  0.000000
5/19/2011	12:23:50 AM	SiCl4 MFC set to  0.000000
5/19/2011	12:23:50 AM	Bypass solenoid MFC set to  0.000000
5/19/2011	12:23:50 AM	Tube furnace set to 0
5/19/2011	12:24:50 AM	Helium valve closed
5/19/2011	12:24:50 AM	H2 valve closed
5/19/2011	12:24:50 AM	BCl3 valve closed
5/19/2011	12:24:50 AM	PH3 valve closed
5/19/2011	12:24:50 AM	SiCl4 pre valve closed
5/19/2011	12:24:50 AM	SiCl4 post valve closed
5/19/2011	12:24:50 AM	Bubbler valve closed
5/19/2011	12:24:50 AM	Main Vac valve opened
5/19/2011	12:24:50 AM	Bypass valve opened
5/19/2011	12:24:50 AM	Helium MFC set to  0.000000
5/19/2011	12:24:50 AM	H2 MFC set to  0.000000
5/19/2011	12:24:50 AM	BCl3 MFC set to  0.000000
5/19/2011	12:24:50 AM	PHl3 MFC set to  0.000000
5/19/2011	12:24:50 AM	SiCl4 MFC set to  0.000000
5/19/2011	12:24:50 AM	Bypass solenoid MFC set to  0.000000
5/19/2011	12:24:50 AM	Tube furnace set to 0
5/19/2011	12:25:50 AM	H2 valve closed
5/19/2011	12:25:50 AM	BCl3 valve closed
5/19/2011	12:25:50 AM	PH3 valve closed
5/19/2011	12:25:50 AM	SiCl4 pre valve closed
5/19/2011	12:25:50 AM	SiCl4 post valve closed
5/19/2011	12:25:50 AM	Bubbler valve closed
5/19/2011	12:25:50 AM	Helium valve opened
5/19/2011	12:25:50 AM	Main Vac valve opened
5/19/2011	12:25:50 AM	Bypass valve opened
5/19/2011	12:25:50 AM	Helium MFC set to  100.000000
5/19/2011	12:25:50 AM	H2 MFC set to  0.000000
5/19/2011	12:25:50 AM	BCl3 MFC set to  0.000000
5/19/2011	12:25:50 AM	PHl3 MFC set to  0.000000
5/19/2011	12:25:50 AM	SiCl4 MFC set to  0.000000
5/19/2011	12:25:50 AM	Bypass solenoid MFC set to  0.000000
5/19/2011	12:25:51 AM	Tube furnace set to 0
5/19/2011	12:26:51 AM	Helium valve closed
5/19/2011	12:26:51 AM	H2 valve closed
5/19/2011	12:26:51 AM	BCl3 valve closed
5/19/2011	12:26:51 AM	PH3 valve closed
5/19/2011	12:26:51 AM	SiCl4 pre valve closed
5/19/2011	12:26:51 AM	SiCl4 post valve closed
5/19/2011	12:26:51 AM	Bubbler valve closed
5/19/2011	12:26:51 AM	Main Vac valve opened
5/19/2011	12:26:51 AM	Bypass valve opened
5/19/2011	12:26:51 AM	Helium MFC set to  0.000000
5/19/2011	12:26:51 AM	H2 MFC set to  0.000000
5/19/2011	12:26:51 AM	BCl3 MFC set to  0.000000
5/19/2011	12:26:51 AM	PHl3 MFC set to  0.000000
5/19/2011	12:26:51 AM	SiCl4 MFC set to  0.000000
5/19/2011	12:26:51 AM	Bypass solenoid MFC set to  0.000000
5/19/2011	12:26:51 AM	Tube furnace set to 0
5/19/2011	12:27:51 AM	H2 valve closed
5/19/2011	12:27:51 AM	BCl3 valve closed
5/19/2011	12:27:51 AM	PH3 valve closed
5/19/2011	12:27:51 AM	SiCl4 pre valve closed
5/19/2011	12:27:51 AM	SiCl4 post valve closed
5/19/2011	12:27:51 AM	Bubbler valve closed
5/19/2011	12:27:51 AM	Helium valve opened
5/19/2011	12:27:51 AM	Main Vac valve opened
5/19/2011	12:27:51 AM	Bypass valve opened
5/19/2011	12:27:51 AM	Helium MFC set to  100.000000
5/19/2011	12:27:51 AM	H2 MFC set to  0.000000
5/19/2011	12:27:51 AM	BCl3 MFC set to  0.000000
5/19/2011	12:27:51 AM	PHl3 MFC set to  0.000000
5/19/2011	12:27:51 AM	SiCl4 MFC set to  0.000000
5/19/2011	12:27:51 AM	Bypass solenoid MFC set to  0.000000
5/19/2011	12:27:51 AM	Tube furnace set to 0
5/19/2011	12:28:51 AM	Helium valve closed
5/19/2011	12:28:51 AM	H2 valve closed
5/19/2011	12:28:51 AM	BCl3 valve closed
5/19/2011	12:28:51 AM	PH3 valve closed
5/19/2011	12:28:51 AM	SiCl4 pre valve closed
5/19/2011	12:28:51 AM	SiCl4 post valve closed
5/19/2011	12:28:51 AM	Bubbler valve closed
5/19/2011	12:28:51 AM	Main Vac valve opened
5/19/2011	12:28:51 AM	Bypass valve opened
5/19/2011	12:28:51 AM	Helium MFC set to  0.000000
5/19/2011	12:28:51 AM	H2 MFC set to  0.000000
5/19/2011	12:28:51 AM	BCl3 MFC set to  0.000000
5/19/2011	12:28:51 AM	PHl3 MFC set to  0.000000
5/19/2011	12:28:51 AM	SiCl4 MFC set to  0.000000
5/19/2011	12:28:51 AM	Bypass solenoid MFC set to  0.000000
5/19/2011	12:28:51 AM	Tube furnace set to 0
5/19/2011	12:29:51 AM	H2 valve closed
5/19/2011	12:29:51 AM	BCl3 valve closed
5/19/2011	12:29:51 AM	PH3 valve closed
5/19/2011	12:29:51 AM	SiCl4 pre valve closed
5/19/2011	12:29:51 AM	SiCl4 post valve closed
5/19/2011	12:29:51 AM	Bubbler valve closed
5/19/2011	12:29:51 AM	Helium valve opened
5/19/2011	12:29:51 AM	Main Vac valve opened
5/19/2011	12:29:51 AM	Bypass valve opened
5/19/2011	12:29:51 AM	Helium MFC set to  100.000000
5/19/2011	12:29:51 AM	H2 MFC set to  0.000000
5/19/2011	12:29:51 AM	BCl3 MFC set to  0.000000
5/19/2011	12:29:51 AM	PHl3 MFC set to  0.000000
5/19/2011	12:29:51 AM	SiCl4 MFC set to  0.000000
5/19/2011	12:29:51 AM	Bypass solenoid MFC set to  0.000000
5/19/2011	12:29:51 AM	Tube furnace set to 0
5/19/2011	12:30:18 AM	Run aborted at 12:30 AM
5/19/2011	12:30:18 AM	Helium valve closed
5/19/2011	12:30:18 AM	H2 valve closed
5/19/2011	12:30:18 AM	BCl3 valve closed
5/19/2011	12:30:18 AM	PH3 valve closed
5/19/2011	12:30:18 AM	SiCl4 pre valve closed
5/19/2011	12:30:18 AM	SiCl4 post valve closed
5/19/2011	12:30:18 AM	Bypass valve closed
5/19/2011	12:30:18 AM	Main Vac valve closed
5/19/2011	12:30:18 AM	Bubbler valve closed
5/19/2011	12:30:18 AM	Helium MFC set to  0.000000
5/19/2011	12:30:18 AM	H2 MFC set to  0.000000
5/19/2011	12:30:18 AM	BCl3 MFC set to  0.000000
5/19/2011	12:30:18 AM	PHl3 MFC set to  0.000000
5/19/2011	12:30:18 AM	SiCl4 MFC set to  0.000000
5/19/2011	12:30:18 AM	Tube furnace set to 0
5/19/2011	12:30:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/19/2011	12:30:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/19/2011	12:30:21 AM	Recipe started at 12:30 AM
5/19/2011	12:30:21 AM	Helium valve closed
5/19/2011	12:30:21 AM	H2 valve closed
5/19/2011	12:30:21 AM	BCl3 valve closed
5/19/2011	12:30:21 AM	PH3 valve closed
5/19/2011	12:30:21 AM	SiCl4 pre valve closed
5/19/2011	12:30:21 AM	SiCl4 post valve closed
5/19/2011	12:30:21 AM	Main Vac valve closed
5/19/2011	12:30:21 AM	Bubbler valve closed
5/19/2011	12:30:21 AM	Bypass valve opened
5/19/2011	12:30:21 AM	Helium MFC set to  0.000000
5/19/2011	12:30:21 AM	H2 MFC set to  0.000000
5/19/2011	12:30:21 AM	BCl3 MFC set to  0.000000
5/19/2011	12:30:21 AM	PHl3 MFC set to  0.000000
5/19/2011	12:30:21 AM	SiCl4 MFC set to  0.000000
5/19/2011	12:30:21 AM	Bypass solenoid MFC set to  0.000000
5/19/2011	12:30:21 AM	Tube furnace set to 0
5/19/2011	12:30:21 AM	Helium valve closed
5/19/2011	12:30:21 AM	H2 valve closed
5/19/2011	12:30:21 AM	BCl3 valve closed
5/19/2011	12:30:21 AM	PH3 valve closed
5/19/2011	12:30:21 AM	SiCl4 pre valve closed
5/19/2011	12:30:21 AM	SiCl4 post valve closed
5/19/2011	12:30:21 AM	Bubbler valve closed
5/19/2011	12:30:21 AM	Main Vac valve opened
5/19/2011	12:30:21 AM	Bypass valve opened
5/19/2011	12:30:21 AM	Helium MFC set to  0.000000
5/19/2011	12:30:21 AM	H2 MFC set to  0.000000
5/19/2011	12:30:21 AM	BCl3 MFC set to  0.000000
5/19/2011	12:30:21 AM	PHl3 MFC set to  0.000000
5/19/2011	12:30:21 AM	SiCl4 MFC set to  0.000000
5/19/2011	12:30:21 AM	Bypass solenoid MFC set to  0.000000
5/19/2011	12:30:21 AM	Tube furnace set to 0
5/19/2011	12:30:22 AM	Run finished at 12:30 AM
5/19/2011	12:30:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/19/2011	12:32:19 AM	Recipe started at 12:32 AM
5/19/2011	12:32:19 AM	BCl3 valve closed
5/19/2011	12:32:19 AM	PH3 valve closed
5/19/2011	12:32:19 AM	SiCl4 pre valve closed
5/19/2011	12:32:19 AM	SiCl4 post valve closed
5/19/2011	12:32:19 AM	Main Vac valve closed
5/19/2011	12:32:19 AM	Bypass valve closed
5/19/2011	12:32:19 AM	Bubbler valve closed
5/19/2011	12:32:19 AM	Helium valve opened
5/19/2011	12:32:19 AM	H2 valve opened
5/19/2011	12:32:19 AM	Helium MFC set to  190.000000
5/19/2011	12:32:19 AM	H2 MFC set to  10.000000
5/19/2011	12:32:19 AM	BCl3 MFC set to  0.000000
5/19/2011	12:32:19 AM	PHl3 MFC set to  0.000000
5/19/2011	12:32:19 AM	SiCl4 MFC set to  0.000000
5/19/2011	12:32:19 AM	Bypass solenoid MFC set to  0.000000
5/19/2011	12:32:19 AM	Tube furnace set to 0
5/19/2011	12:35:43 AM	BCl3 valve closed
5/19/2011	12:35:43 AM	PH3 valve closed
5/19/2011	12:35:43 AM	SiCl4 pre valve closed
5/19/2011	12:35:43 AM	SiCl4 post valve closed
5/19/2011	12:35:43 AM	Main Vac valve closed
5/19/2011	12:35:43 AM	Bypass valve closed
5/19/2011	12:35:43 AM	Helium valve opened
5/19/2011	12:35:43 AM	H2 valve opened
5/19/2011	12:35:43 AM	Bubbler valve opened
5/19/2011	12:35:43 AM	Helium MFC set to  47.500000
5/19/2011	12:35:43 AM	H2 MFC set to  2.500000
5/19/2011	12:35:43 AM	BCl3 MFC set to  0.000000
5/19/2011	12:35:43 AM	PHl3 MFC set to  0.000000
5/19/2011	12:35:43 AM	SiCl4 MFC set to  0.000000
5/19/2011	12:35:43 AM	Bypass solenoid MFC set to  0.000000
5/19/2011	12:35:44 AM	Tube furnace set to 350
5/19/2011	10:03:46 AM	Run aborted at 10:03 AM
5/19/2011	10:03:46 AM	Helium valve closed
5/19/2011	10:03:46 AM	H2 valve closed
5/19/2011	10:03:46 AM	BCl3 valve closed
5/19/2011	10:03:46 AM	PH3 valve closed
5/19/2011	10:03:46 AM	SiCl4 pre valve closed
5/19/2011	10:03:46 AM	SiCl4 post valve closed
5/19/2011	10:03:46 AM	Bypass valve closed
5/19/2011	10:03:46 AM	Main Vac valve closed
5/19/2011	10:03:46 AM	Bubbler valve closed
5/19/2011	10:03:46 AM	Helium MFC set to  0.000000
5/19/2011	10:03:46 AM	H2 MFC set to  0.000000
5/19/2011	10:03:46 AM	BCl3 MFC set to  0.000000
5/19/2011	10:03:46 AM	PHl3 MFC set to  0.000000
5/19/2011	10:03:46 AM	SiCl4 MFC set to  0.000000
5/19/2011	10:03:46 AM	Tube furnace set to 0
5/19/2011	10:53:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/19/2011	10:53:08 AM	Recipe started at 10:53 AM
5/19/2011	10:53:08 AM	H2 valve closed
5/19/2011	10:53:08 AM	BCl3 valve closed
5/19/2011	10:53:08 AM	PH3 valve closed
5/19/2011	10:53:08 AM	SiCl4 pre valve closed
5/19/2011	10:53:08 AM	SiCl4 post valve closed
5/19/2011	10:53:08 AM	Main Vac valve closed
5/19/2011	10:53:08 AM	Bypass valve closed
5/19/2011	10:53:08 AM	Bubbler valve closed
5/19/2011	10:53:08 AM	Helium valve opened
5/19/2011	10:53:08 AM	Helium MFC set to  500.000000
5/19/2011	10:53:08 AM	H2 MFC set to  0.000000
5/19/2011	10:53:08 AM	BCl3 MFC set to  0.000000
5/19/2011	10:53:08 AM	PHl3 MFC set to  0.000000
5/19/2011	10:53:08 AM	SiCl4 MFC set to  0.000000
5/19/2011	10:53:08 AM	Bypass solenoid MFC set to  0.000000
5/19/2011	10:53:08 AM	Tube furnace set to 0
5/19/2011	10:53:11 AM	Helium valve closed
5/19/2011	10:53:11 AM	H2 valve closed
5/19/2011	10:53:11 AM	BCl3 valve closed
5/19/2011	10:53:11 AM	PH3 valve closed
5/19/2011	10:53:11 AM	SiCl4 pre valve closed
5/19/2011	10:53:11 AM	SiCl4 post valve closed
5/19/2011	10:53:11 AM	Main Vac valve closed
5/19/2011	10:53:11 AM	Bypass valve closed
5/19/2011	10:53:11 AM	Bubbler valve closed
5/19/2011	10:53:11 AM	Helium MFC set to  0.000000
5/19/2011	10:53:11 AM	H2 MFC set to  0.000000
5/19/2011	10:53:11 AM	BCl3 MFC set to  0.000000
5/19/2011	10:53:11 AM	PHl3 MFC set to  0.000000
5/19/2011	10:53:11 AM	SiCl4 MFC set to  0.000000
5/19/2011	10:53:11 AM	Bypass solenoid MFC set to  0.000000
5/19/2011	10:53:11 AM	Tube furnace set to 0
5/19/2011	10:53:12 AM	Run finished at 10:53 AM
5/19/2011	10:53:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/19/2011	11:07:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/19/2011	11:07:53 AM	Recipe started at 11:07 AM
5/19/2011	11:07:53 AM	H2 valve closed
5/19/2011	11:07:53 AM	BCl3 valve closed
5/19/2011	11:07:53 AM	PH3 valve closed
5/19/2011	11:07:53 AM	SiCl4 pre valve closed
5/19/2011	11:07:53 AM	SiCl4 post valve closed
5/19/2011	11:07:53 AM	Main Vac valve closed
5/19/2011	11:07:53 AM	Bypass valve closed
5/19/2011	11:07:53 AM	Bubbler valve closed
5/19/2011	11:07:53 AM	Helium valve opened
5/19/2011	11:07:53 AM	Helium MFC set to  500.000000
5/19/2011	11:07:53 AM	H2 MFC set to  0.000000
5/19/2011	11:07:53 AM	BCl3 MFC set to  0.000000
5/19/2011	11:07:53 AM	PHl3 MFC set to  0.000000
5/19/2011	11:07:53 AM	SiCl4 MFC set to  0.000000
5/19/2011	11:07:53 AM	Bypass solenoid MFC set to  0.000000
5/19/2011	11:07:53 AM	Tube furnace set to 0
5/19/2011	11:07:58 AM	Helium valve closed
5/19/2011	11:07:58 AM	H2 valve closed
5/19/2011	11:07:58 AM	BCl3 valve closed
5/19/2011	11:07:58 AM	PH3 valve closed
5/19/2011	11:07:58 AM	SiCl4 pre valve closed
5/19/2011	11:07:58 AM	SiCl4 post valve closed
5/19/2011	11:07:58 AM	Main Vac valve closed
5/19/2011	11:07:58 AM	Bypass valve closed
5/19/2011	11:07:58 AM	Bubbler valve closed
5/19/2011	11:07:58 AM	Helium MFC set to  0.000000
5/19/2011	11:07:58 AM	H2 MFC set to  0.000000
5/19/2011	11:07:58 AM	BCl3 MFC set to  0.000000
5/19/2011	11:07:58 AM	PHl3 MFC set to  0.000000
5/19/2011	11:07:58 AM	SiCl4 MFC set to  0.000000
5/19/2011	11:07:58 AM	Bypass solenoid MFC set to  0.000000
5/19/2011	11:07:58 AM	Tube furnace set to 0
5/19/2011	11:07:58 AM	Run finished at 11:07 AM
5/19/2011	11:07:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/19/2011	11:20:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/19/2011	11:20:40 AM	Recipe started at 11:20 AM
5/19/2011	11:20:40 AM	Helium valve closed
5/19/2011	11:20:40 AM	H2 valve closed
5/19/2011	11:20:40 AM	BCl3 valve closed
5/19/2011	11:20:40 AM	PH3 valve closed
5/19/2011	11:20:40 AM	SiCl4 pre valve closed
5/19/2011	11:20:40 AM	SiCl4 post valve closed
5/19/2011	11:20:40 AM	Main Vac valve closed
5/19/2011	11:20:40 AM	Bubbler valve closed
5/19/2011	11:20:40 AM	Bypass valve opened
5/19/2011	11:20:40 AM	Helium MFC set to  0.000000
5/19/2011	11:20:40 AM	H2 MFC set to  0.000000
5/19/2011	11:20:40 AM	BCl3 MFC set to  0.000000
5/19/2011	11:20:40 AM	PHl3 MFC set to  0.000000
5/19/2011	11:20:40 AM	SiCl4 MFC set to  0.000000
5/19/2011	11:20:40 AM	Bypass solenoid MFC set to  0.000000
5/19/2011	11:20:40 AM	Tube furnace set to 0
5/19/2011	11:21:12 AM	Helium valve closed
5/19/2011	11:21:12 AM	H2 valve closed
5/19/2011	11:21:12 AM	BCl3 valve closed
5/19/2011	11:21:12 AM	PH3 valve closed
5/19/2011	11:21:12 AM	SiCl4 pre valve closed
5/19/2011	11:21:12 AM	SiCl4 post valve closed
5/19/2011	11:21:12 AM	Bubbler valve closed
5/19/2011	11:21:12 AM	Main Vac valve opened
5/19/2011	11:21:12 AM	Bypass valve opened
5/19/2011	11:21:12 AM	Helium MFC set to  0.000000
5/19/2011	11:21:12 AM	H2 MFC set to  0.000000
5/19/2011	11:21:12 AM	BCl3 MFC set to  0.000000
5/19/2011	11:21:12 AM	PHl3 MFC set to  0.000000
5/19/2011	11:21:12 AM	SiCl4 MFC set to  0.000000
5/19/2011	11:21:12 AM	Bypass solenoid MFC set to  0.000000
5/19/2011	11:21:12 AM	Tube furnace set to 0
5/19/2011	11:21:13 AM	Run finished at 11:21 AM
5/19/2011	11:21:13 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
